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Classed Clean Room Standards

Particle Size

Class 10 ISO4

Class 100 ISO5

Class 1,000 ISO6

Class 10,000 ISO7

Class 100,000 ISO8

≥ 0.1µm 10,000 100,000 1,000,000 ≥ 0.2µm 2,370 237,000 237,000 ≥ 0.3µm 1,020 102,000 102,000 ≥ 0.5µm 352 3,520 35,200

352,000 83,200

3,520,000

≥ 1.0µm ≥ 5.0µm

83

8,320

8,320 2,930

832,000 29,300

293

2,930

• Specifications listed are (Number of Particles / m 3 ). • ISO Class according to ISO 14644-1 cleanroom standards • Class 10, Class 100, etc. are the FED STD 209E equivalent

Reagent Purity

• Clean Acids (HNO 3 • Clean Bases (TEA, NH 4 OH, etc.) • Clean DI Water (ASTM Type 1, 18MΩ) • Particle Filtration (0.3µm or smaller) • Use of reagent blanks , HCl, etc.)

• Critical for blank subtraction to determine true real- world sample impurity levels and detection limits